He implantation induced relaxation of SiGe/Si: nucleation of dislocations and coarsening of He bubbles

Luysberg, M.M.LuysbergHueging, N.N.HuegingUrban, K.K.UrbanBuca, D.D.BucaHolländer, B.B.HolländerMantl, S.S.MantlMorschbacher, M.M.MorschbacherFichner, P.F.P.P.F.P.FichnerLoo, RogerRogerLooCaymax, MattyMattyCaymax2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9235He implantation induced relaxation of SiGe/Si: nucleation of dislocations and coarsening of He bubblesProceedings paper