Vandervorst, WilfriedWilfriedVandervorstJanssens, TomTomJanssensEyben, PierrePierreEybenDuriau, EdouardEdouardDuriau2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/11466Dopant/carrier profiling for sub-45nm technologiesMeeting abstract