Density controlled nanophotonic waveguide gratings for efficient on-chip out-coupling in the near field

Vercruysse, DriesDriesVercruysseMukund, VigneshVigneshMukundJansen, RoelofRoelofJansenStahl, RichardRichardStahlVan Dorpe, PolPolVan DorpeLagae, LiesbetLiesbetLagaeRottenberg, XavierXavierRottenberg2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/27520Density controlled nanophotonic waveguide gratings for efficient on-chip out-coupling in the near fieldProceedings paperhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=2541476