Chava, BharaniBharaniChavaShaik, Khaja AhmadKhaja AhmadShaikJourdain, AnneAnneJourdainGuissi, SofianeSofianeGuissiWeckx, PieterPieterWeckxRyckaert, JulienJulienRyckaertVan der Plas, GeertGeertVan der PlasSpessot, AlessioAlessioSpessotBeyne, EricEricBeyneMocuta, AndaAndaMocuta2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/32688Backside power delivery as a scaling knob for future systemsMeeting abstracthttps://doi.org/10.1117/12.2514942