Cosnier, VincentVincentCosnierBender, HugoHugoBenderCaymax, MattyMattyCaymaxChen, JianJianChenConard, ThierryThierryConardNohira, HiroshiHiroshiNohiraRichard, OlivierOlivierRichardTsai, WilmanWilmanTsaiVandervorst, WilfriedWilfriedVandervorstYoung, EdwardEdwardYoungZhao, ChaoChaoZhaoDe Gendt, StefanStefanDe GendtHeyns, MarcMarcHeynsMaes, JosJosMaesTuominen, MarkoMarkoTuominenRochat, N.N.RochatOlivier, M.M.OlivierChabli, A.A.Chabli2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5171Infrared interface analysis of high-k dielectrics deposited by atomic layer chemical vapour depositionProceedings paper