Loo, RogerRogerLooHikavyy, AndriyAndriyHikavyyWitters, LiesbethLiesbethWittersSchulze, AndreasAndreasSchulzeArimura, HiroakiHiroakiArimuraCott, DaireDaireCottMitard, JeromeJeromeMitardPorret, ClémentClémentPorretMertens, HansHansMertensRyan, PaulPaulRyanWall, JohnJohnWallMatney, KevinKevinMatneyWormington, MatthewMatthewWormingtonFavia, PaolaPaolaFaviaRichard, OlivierOlivierRichardBender, HugoHugoBenderHoriguchi, NaotoNaotoHoriguchiCollaert, NadineNadineCollaertThean, AaronAaronThean2021-10-232021-10-232016-09https://imec-publications.be/handle/20.500.12860/26927Processing technologies for advanced Ge devicesProceedings paperhttp://ecst.ecsdl.org/content/75/8/491.abstract