Flexible fabrication of microlenses in polymer layers with excimer laser ablation

Naessens, KrisKrisNaessensOttevaere, HeidiHeidiOttevaereVan Daele, PeterPeterVan DaeleBaets, RoelRoelBaets2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7922Flexible fabrication of microlenses in polymer layers with excimer laser ablationJournal article