Scaling down the interpoly dielectric for next generation flash memory: challenges and opportunities

Govoreanu, BogdanBogdanGovoreanuBrunco, DavidDavidBruncoVan Houdt, JanJanVan Houdt2021-10-162021-10-162005-05https://imec-publications.be/handle/20.500.12860/10522Scaling down the interpoly dielectric for next generation flash memory: challenges and opportunitiesProceedings paper