Popovici, Mihaela IoanaMihaela IoanaPopoviciDelabie, AnneliesAnneliesDelabieAdelmann, ChristophChristophAdelmannMeersschaut, JohanJohanMeersschautFranquet, AlexisAlexisFranquetTallarida, MassimoMassimoTallaridaVan den Berg, JaapJaapVan den BergRichard, OlivierOlivierRichardSwerts, JohanJohanSwertsTomida, KazuyukiKazuyukiTomidaKim, Min-SooMin-SooKimTielens, HildeHildeTielensBender, HugoHugoBenderConard, ThierryThierryConardJurczak, GosiaGosiaJurczakVan Elshocht, SvenSvenVan ElshochtSchmeisser, DieterDieterSchmeisser2021-10-212021-10-2120132162-8769https://imec-publications.be/handle/20.500.12860/22948Understanding the interface reactions of rutile TiO2 grown by atomic layer deposition on oxidized rutheniumJournal article