Simoen, EddyEddySimoenDepauw, ValerieValerieDepauwGordon, IvanIvanGordonPoortmans, JefJefPoortmans2021-10-202021-10-2020120268-1242https://imec-publications.be/handle/20.500.12860/21513DLTS of p-type Czochralski Si wafers containing processing-induced macroporesJournal article