Investigation of iridium as a gate electrode for deep sub-micron CMOS technology

Pawlak, M.A.M.A.PawlakSchram, TomTomSchramMaex, KarenKarenMaexVantomme, AndreAndreVantomme2021-10-152021-10-152003-11https://imec-publications.be/handle/20.500.12860/7991Investigation of iridium as a gate electrode for deep sub-micron CMOS technologyJournal article