The development of an EUVL pellicle comprising carbon nanomaterials

Vanpaemel, JohannesJohannesVanpaemelLee, Jae UkJae UkLeeKrishnaraj, ChidharthChidharthKrishnarajPollentier, IvanIvanPollentierHuyghebaert, CedricCedricHuyghebaertAdelmann, ChristophChristophAdelmannGallagher, EmilyEmilyGallagher2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/27499The development of an EUVL pellicle comprising carbon nanomaterialsMeeting abstract