Zhang, R.R.ZhangBordas, F.F.Bordasvan der Tol, J.J.G.M.J.J.G.M.van der TolAmbrosius, H.H.AmbrosiusRoelkens, GuntherGuntherRoelkensDundar, M.A.M.A.DundarSmit, M.K.M.K.SmitThijs, P.P.Thijs2021-10-192021-10-192010https://imec-publications.be/handle/20.500.12860/18417Submicron active-passive integration for InP-based membranes on siliconProceedings paper