A novel in-situ resistance measurement to extract IMC resistivity and kinetic parameter for CoSn 3D stacks

Hou, LinLinHouDerakhshandeh, JaberJaberDerakhshandehDe Coster, JeroenJeroenDe CosterWang, TengTengWangCherman, VladimirVladimirChermanBex, PieterPieterBexVan De Plas, GeertGeertVan De PlasBeyer, GeraldGeraldBeyerBeyne, EricEricBeyneDe Wolf, IngridIngridDe Wolf2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/28529A novel in-situ resistance measurement to extract IMC resistivity and kinetic parameter for CoSn 3D stacksProceedings paperhttp://ieeexplore.ieee.org/document/8309244/