Influence of top electrode deposition conditions on the reliability of integrated SBT ferroelectric capacitors

Goux, LudovicLudovicGouxXu, ZhenZhenXuParaschiv, VasileVasileParaschivSchwitters, M.M.SchwittersLisoni, JuditJuditLisoniMaes, DavidDavidMaesHaspeslagh, LucLucHaspeslaghGroeseneken, GuidoGuidoGroesenekenZambrano, R.R.ZambranoWouters, DirkDirkWouters2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/8976Influence of top electrode deposition conditions on the reliability of integrated SBT ferroelectric capacitorsOral presentation