Groven, BenjaminBenjaminGrovenNalin Mehta, AnkitAnkitNalin MehtaBender, HugoHugoBenderMeersschaut, JohanJohanMeersschautNuytten, ThomasThomasNuyttenVerdonck, PatrickPatrickVerdonckConard, ThierryThierryConardSmets, QuentinQuentinSmetsSchram, TomTomSchramSchoenaers, BenBenSchoenaersStesmans, AndreAndreStesmansAfanasiev, ValeriValeriAfanasievVandervorst, WilfriedWilfriedVandervorstHeyns, MarcMarcHeynsCaymax, MattyMattyCaymaxRadu, IulianaIulianaRaduDelabie, AnneliesAnneliesDelabie2021-10-252021-10-2520180897-4756https://imec-publications.be/handle/20.500.12860/30809Two-dimensional crystal grain size tuning in WS2 atomic layer deposition: an insight in the nucleation mechanismJournal article10.1021/acs.chemmater.8b02924