Use of polymer liners for 3D-WLP TSVs: process, reliability and cost

Sabuncuoglu Tezcan, DenizDenizSabuncuoglu TezcanPham, NgaNgaPhamMajeed, BivraghBivraghMajeedCivale, YannYannCivaleBeyne, EricEricBeyne2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17924Use of polymer liners for 3D-WLP TSVs: process, reliability and costMeeting abstract