De Wolf, IngridIngridDe WolfCzarnecki, PiotrPiotrCzarneckiDe Coster, JeroenJeroenDe CosterVarela Pedreira, OlallaOlallaVarela PedreiraRottenberg, XavierXavierRottenbergSangameswaran, SandeepSandeepSangameswaran2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/22230Reliability of RF MEMSBook chapter