Nanosheet FETs and their Potential for Enabling Continued Moore's Law Scaling

Veloso, AnabelaAnabelaVelosoEneman, GeertGeertEnemanDe Keersgieter, AnAnDe KeersgieterJang, DoyoungDoyoungJangMertens, HansHansMertensMatagne, PhilippePhilippeMatagneDentoni Litta, EugenioEugenioDentoni LittaRyckaert, JulienJulienRyckaertHoriguchi, NaotoNaotoHoriguchi2022-03-162022-03-162021naWOS:000675595800128https://imec-publications.be/handle/20.500.12860/39454Nanosheet FETs and their Potential for Enabling Continued Moore's Law ScalingProceedings paper10.1109/EDTM50988.2021.9420942978-1-7281-8176-9WOS:000675595800128