Initial growth stages of heavily boron-doped HFCVD diamond for electrical probe application

Simon, DanielDanielSimonTsigkourakos, MenelaosMenelaosTsigkourakosHantschel, ThomasThomasHantschelConard, ThierryThierryConardVandervorst, WilfriedWilfriedVandervorst2021-10-212021-10-2120130031-8965https://imec-publications.be/handle/20.500.12860/23094Initial growth stages of heavily boron-doped HFCVD diamond for electrical probe applicationJournal articlehttp://onlinelibrary.wiley.com/doi/10.1002/pssa.201300041/abstract