Conard, ThierryThierryConardvan der Heide, PaulPaulvan der HeideVanleenhove, AnjaAnjaVanleenhoveZborowski, CharlotteCharlotteZborowskiVandervorst, WilfriedWilfriedVandervorst2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/32737Achieving reproducible data: examples from surface analysis in semiconductor technologyMeeting abstracthttps://www2.avs.org/symposium2019/Papers/Paper_RA+AS+BI-WeA2.html