De Volder, MichaelMichaelDe VolderDe Coster, JeroenJeroenDe CosterReynaerts, DominiekDominiekReynaertsVan Hoof, ChrisChrisVan HoofSang-Gook, KimKimSang-Gook2021-10-202021-10-2020121613-6810https://imec-publications.be/handle/20.500.12860/20563High-damping carbon nanotube hinged micromirrorsJournal article