Zhang, LipingLipingZhangde Marneffe, Jean-FrancoisJean-Francoisde MarneffeMurdoch, GayleGayleMurdochVega Gonzalez, VictorVictorVega GonzalezVerdonck, PatrickPatrickVerdonckHeylen, NancyNancyHeylenZha, LichenLichenZhaWu, ChenChenWuLesniewska, AlicjaAlicjaLesniewskaTokei, ZsoltZsoltTokeiBoemmels, JuergenJuergenBoemmelsDe Gendt, StefanStefanDe GendtLefferts, ScottScottLefferts2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/30020Integration of ultralow-k dielectrics using a template replacement approachMeeting abstracthttp://www.mrs.org/technical-programs/programs_abstracts/2017_mrs_spring_meeting_exhibit/ed9/ed9_3_2/ed9_3_04_3