Quack, NielsNielsQuackSattari, HamedHamedSattariTakabayashi, Alain YujiAlain YujiTakabayashiZhang, YuYuZhangVerheyen, PeterPeterVerheyenBogaerts, WimWimBogaertsEdinger, PierrePierreEdingerErrando-Herranz, CarlosCarlosErrando-HerranzGylfason, Kristinn B.Kristinn B.Gylfason2021-10-292021-10-292020-020018-9197https://imec-publications.be/handle/20.500.12860/35776MEMS-enabled silicon photonic integrated devices and circuitsJournal articlehttps://ieeexplore.ieee.org/document/8864062