Plasma-assisted and thermal atomic layer deposition of electrochemically active Li2CO3

Hornsveld, NorahNorahHornsveldPut, BrechtBrechtPutKessels, ErwinErwinKesselsVereecken, PhilippePhilippeVereeckenCreatore, MariadrianaMariadrianaCreatore2021-10-242021-10-2420172046-2069https://imec-publications.be/handle/20.500.12860/28525Plasma-assisted and thermal atomic layer deposition of electrochemically active Li2CO3Journal articlehttp://pubs.rsc.org/en/content/articlelanding/2017/ra/c7ra07722j#!divAbstract