Mair, RobinRobinMairLiebens, MaartenMaartenLiebensMurray, T.T.MurrayKotelyanskii, M.Mehendale, M.Ru, X.Mukundhan, PriyaKryman, TimothyVan Huylenbroeck, StefaanHaensel, LeanderMiller, AndyBeyne, Eric2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/26945Non-destructive acoustic metrology and void detection in 3x50μm TSVMeeting abstracthttp://ieeexplore.ieee.org/document/7491103/