Linewidth dependence of the reverse bias junction leakage for co-silicided source/drain junctions

Lauwers, AnneAnneLauwersde Potter de ten Broeck, MurielMurielde Potter de ten BroeckLindsay, RichardRichardLindsayChamirian, OxanaOxanaChamirianDemeurisse, CarolineCarolineDemeurisseVrancken, ChristaChristaVranckenMaex, KarenKarenMaex2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6529Linewidth dependence of the reverse bias junction leakage for co-silicided source/drain junctionsProceedings paper