Rapid recovery process of plasma damaged porous low-k dielectrics by wet surface modifying treatment

Iwasaki, A,A,IwasakiHiguchi, A.A.HiguchiKomori, K.K.KomoriSato, M.M.SatoKesters, ElsElsKestersLe, Quoc ToanQuoc ToanLeHolsteyns, FrankFrankHolsteyns2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/26771Rapid recovery process of plasma damaged porous low-k dielectrics by wet surface modifying treatmentProceedings paperhttp://www.scientific.net/SSP.255.223