Charavel, RemyRemyCharavelGassot, PierrePierreGassotde Backer, E.E.de BackerAltamirano Sanchez, EfrainEfrainAltamirano SanchezVan Aelst, JokeJokeVan AelstDevriendt, KatiaKatiaDevriendtVan Wichelen, KoenKoenVan Wichelen2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/16841Wafer bevel protection during deep reactive ion etchingOral presentation