Furuhashi, TakahisaTakahisaFuruhashiHaneda, MasakiMasakiHanedaSasaki, ToruToruSasakiKagawa, YoshihisaYoshihisaKagawaOoka, YutakaYutakaOokaHirano, TomoyukiTomoyukiHiranoOhno, KeiichiKeiichiOhnoIwamoto, HayatoHayatoIwamotoSaito, MasakiMasakiSaitoLiu, YefanYefanLiuHiblot, GaspardGaspardHiblotVanstreels, KrisKrisVanstreelsGonzalez, MarioMarioGonzalezVelenis, DimitriosDimitriosVelenisBeyer, GeraldGeraldBeyerVan der Plas, GeertGeertVan der PlasDe Wolf, IngridIngridDe WolfBeyne, EricEricBeyne2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/32997Characterization of Impact of Vertical Stress on FinFETsMeeting abstracthttps://ieeexplore.ieee.org/document/8951822