Laricchiuta, GraziaGraziaLaricchiuta2021-10-272021-10-272019-11https://imec-publications.be/handle/20.500.12860/33372Innovation in ion beam analysis for nanoelectronic materialsPHD thesishttps://limo.libis.be/primo-explore/fulldisplay?docid=LIRIAS2866348&context=L&vid=Lirias&search_scope=Lirias&tab=default_tab&lang=en_US