Improved fabrication process for III-V based optical Interconnects on silicon

Spuesens, ThijsThijsSpuesensRegreny, PhilippePhilippeRegrenyVan Thourhout, DriesDriesVan Thourhout2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/23114Improved fabrication process for III-V based optical Interconnects on siliconProceedings paperhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=6644417&refinements%3D4281272348%26sortType%3Dasc_p_Sequence%26filter