Thermal budget impact on HKMG Al2O3 and La-based stacks for 2x DRAM periphery transistors

Ritzenthaler, RomainRomainRitzenthalerSchram, TomTomSchramSpessot, AlessioAlessioSpessotCaillat, ChristianChristianCaillatNa, Hoon JoHoon JoNaLee, Sun GhilSun GhilLeeSon, YunikYunikSonNoh, Kyung BongKyung BongNohAoulaiche, MarcMarcAoulaicheArimura, HiroakiHiroakiArimuraHoriguchi, NaotoNaotoHoriguchiFazan, PierrePierreFazanThean, AaronAaronThean2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/24436Thermal budget impact on HKMG Al2O3 and La-based stacks for 2x DRAM periphery transistorsProceedings paperhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?tp=&arnumber=6818721&sortType%3Ddesc_p_Publication_Year%26queryText%3Dritzenth