Brijs, BertBertBrijsDeleu, JeroenJeroenDeleuConard, ThierryThierryConardLi, H.H.LiLoo, RogerRogerLooCaymax, MattyMattyCaymaxNakajima, K.K.NakajimaKimura, K.K.KimuraVandervorst, WilfriedWilfriedVandervorst2021-10-062021-10-061999https://imec-publications.be/handle/20.500.12860/3272Characterization of ultra thin layers by Rutherford backscattering spectrometryProceedings paper