Poly SiGe, a promising material for MEMS post-processing on top of standard CMOS wafers

Sedky, SherifSherifSedkyWitvrouw, AnnAnnWitvrouwBaert, KrisKrisBaert2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5641Poly SiGe, a promising material for MEMS post-processing on top of standard CMOS wafersProceedings paper