Kruv, AnastasiiaAnastasiiaKruvvan Setten, MichielMichielvan SettenDekkers, HaroldHaroldDekkersLorant, ChristopheChristopheLorantVerreck, DevinDevinVerreckSmets, QuentinQuentinSmetsYengula Venkata Ramana, BhuvaneshwariBhuvaneshwariYengula Venkata RamanaBelmonte, AttilioAttilioBelmonteSubhechha, SubhaliSubhaliSubhechhaVaisman Chasin, AdrianAdrianVaisman ChasinDelhougne, RomainRomainDelhougneKar, Gouri SankarGouri SankarKar2024-01-112023-08-292024-01-1120230018-9383WOS:001047577100001https://imec-publications.be/handle/20.500.12860/42417The Impact of IGZO Channel Composition on DRAM Transistor PerformanceJournal article10.1109/TED.2023.3297976WOS:001047577100001OXIDEDEPOSITION