Dual beam FIB/SEM cross-section imaging of nano-structures

Bender, HugoHugoBenderDrijbooms, ChrisChrisDrijboomsVan Marcke, PatriciaPatriciaVan MarckeGeypen, JefJefGeypenMarrant, KoenKoenMarrant2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/11714Dual beam FIB/SEM cross-section imaging of nano-structuresOral presentation