The removal of silica particles from micron wide trenches by megasonic cleaning

Wostyn, KurtKurtWostynQuenette, V.V.QuenetteVereecke, GuyGuyVereeckeMertens, PaulPaulMertens2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14796The removal of silica particles from micron wide trenches by megasonic cleaningProceedings paper