Conley, WillWillConleyMontgomery, PatrickPatrickMontgomeryLucas, KevinKevinLucasLitt, Lloyd C.Lloyd C.LittMaltabes, John G.John G.MaltabesDieu, LaurentLaurentDieuHughes, Gregory P,Gregory P,HughesMellenthin, David L.David L.MellenthinSocha, Robert J.Robert J.SochaFanucchi, Eric L.Eric L.FanucchiVerhappen, ArjanArjanVerhappenWampler, Kurt E.Kurt E.WamplerYu, LindaLindaYuSchaefer, ErikaErikaSchaeferCassel, ShawnShawnCasselKuijten, Jan P.Jan P.KuijtenPijnenburg, WilWilPijnenburgWiaux, VincentVincentWiauxVandenberghe, GeertGeertVandenberghe2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7344Mighty hight-t lithography for 65nm generation contactsProceedings paper