Multilayer thin-film MCM-D for the integration of high- performance RF and microwave circuits

Carchon, GeertGeertCarchonVaesen, KristofKristofVaesenBrebels, StevenStevenBrebelsDe Raedt, WalterWalterDe RaedtBeyne, EricEricBeyneNauwelaers, BartBartNauwelaers2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5119Multilayer thin-film MCM-D for the integration of high- performance RF and microwave circuitsJournal article