Characteristics and integration challenges of FinFET-based devices for (Sub-)22nm technology nodes circuit applications

Veloso, AnabelaAnabelaVelosoVan Dal, MarkMarkVan DalCollaert, NadineNadineCollaertDe Keersgieter, AnAnDe KeersgieterWitters, LiesbethLiesbethWittersRooyackers, RitaRitaRooyackersRedolfi, AugustoAugustoRedolfiBrus, StephanStephanBrusDuffy, RayRayDuffyPawlak, BartekBartekPawlakVellianitis, GeorgiosGeorgiosVellianitisDuriez, BlandineBlandineDuriezMerelle, ThomasThomasMerelleAbsil, PhilippePhilippeAbsilBiesemans, SergeSergeBiesemansJurczak, GosiaGosiaJurczakHoffmann, Thomas Y.Thomas Y.HoffmannLander, RobRobLander2021-10-182021-10-182009-10https://imec-publications.be/handle/20.500.12860/16455Characteristics and integration challenges of FinFET-based devices for (Sub-)22nm technology nodes circuit applicationsProceedings paper