Baklanov, MikhaïlMikhaïlBaklanovVanstreels, KrisKrisVanstreelsWu, ChenChenWuLi, YunlongYunlongLiCroes, KristofKristofCroes2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/26308Low dielectric constant materials for nanoelectronicsBook chapter