Das, SayantanSayantanDasKisson, NicolaNicolaKissonMahmud Ul Hasan, Hasan MDHasan MDMahmud Ul HasanRynders, LucLucRyndersKljucar, LukaLukaKljucarHalder, SandipSandipHalderLeray, PhilippePhilippeLerayDusa, MirceaMirceaDusaRio, DavidDavidRioMohsen, MahmoudMahmoudMohsenSpence, ChrisChrisSpenceDe Poortere, EtienneEtienneDe Poortere2022-08-312022-05-222022-06-162022-07-082022-08-052022-08-312021978-1-5106-4552-30277-786XWOS:000792657300006https://imec-publications.be/handle/20.500.12860/3987428nm-pitch Ru interconnects patterned with 0.33NA-EUV single exposureProceedings paper10.1117/12.2600937978-1-5106-4553-0WOS:000792657300006