Crack-free GaN Grown on Si(111) by MOVPE by introducing Step-Graded AlGaN Buffer Layers

Cheng, KaiKaiChengLeys, MaartenMaartenLeysDegroote, StefanStefanDegrooteBoeykens, StevenStevenBoeykensDerluyn, JoffJoffDerluynGermain, MarianneMarianneGermainEngelen, JanJanEngelenBorghs, GustaafGustaafBorghs2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10213Crack-free GaN Grown on Si(111) by MOVPE by introducing Step-Graded AlGaN Buffer LayersOral presentation