The limitations of SIMS in nanoscale technologies: quantitative near-surface and interfacial analysis of complex systems

Vandervorst, WilfriedWilfriedVandervorstJanssens, TomTomJanssensGeenen, LucLucGeenenHuyghebaert, CedricCedricHuyghebaertConard, ThierryThierryConardBrijs, BertBertBrijs2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/11468The limitations of SIMS in nanoscale technologies: quantitative near-surface and interfacial analysis of complex systemsMeeting abstract