Ke, XiaoxingXiaoxingKeChiodarelli, NicoloNicoloChiodarellivan der Veen, MarleenMarleenvan der VeenVereecke, BartBartVereeckeHantschel, ThomasThomasHantschelBals, S.S.BalsVan Tendeloo, G.G.Van Tendeloo2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/19166TEM study of carbon nanotube interconnectsMeeting abstract