First demonstration of SiGe channel in Macaroni geometry for future 3D NAND devices

Arreghini, AntonioAntonioArreghiniDelhougne, RomainRomainDelhougneSubirats, AlexandreAlexandreSubiratsHikavyy, AndriyAndriyHikavyyVan den Bosch, GeertGeertVan den BoschFurnemont, ArnaudArnaudFurnemont2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/27767First demonstration of SiGe channel in Macaroni geometry for future 3D NAND devicesProceedings paperhttp://ieeexplore.ieee.org/document/7939083/