Trager-Cowan, C.C.Trager-CowanMiddleton, P. G.P. G.MiddletonMohammed, A.A.MohammedManson-Smith, S. K.S. K.Manson-SmithOsborne, I.I.OsborneBarisonzi, M.M.BarisonziO'Donnell, K. P.K. P.O'DonnellVan der Stricht, WimWimVan der StrichtJacobs, KoenKoenJacobsMoerman, IngridIngridMoermanDemeester, PietPietDemeester2021-10-142021-10-141999https://imec-publications.be/handle/20.500.12860/3882Probing nitride thin films in 3-dimensions using a variable energy electron beamOral presentation