Spectroscopic study of oxygen related lattice defects in annealed silicon

Vanhellemont, JanJanVanhellemontLibezny, MilanMilanLibeznySimoen, EddyEddySimoenClaeys, CorCorClaeysClauws, P.P.ClauwsBlondeel, A.A.Blondeel2021-09-292021-09-291994https://imec-publications.be/handle/20.500.12860/425Spectroscopic study of oxygen related lattice defects in annealed siliconOral presentation