Selective etches for gate-all-around (GAA) device integration: opportunities and challenges

Oniki, YusukeYusukeOnikiAltamirano Sanchez, EfrainEfrainAltamirano SanchezHolsteyns, FrankFrankHolsteyns2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/33697Selective etches for gate-all-around (GAA) device integration: opportunities and challengesProceedings paperhttp://ecst.ecsdl.org/content/92/2/3.abstract